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SAES Getters' PageLid is the ideal technological solution to integrate a Page thin film inside a hermetic vacuum discrete package of moving or resonating devices, particularly MEMS.
By keeping pressure or impurity level under control, it delivers vacuum long term stability, thus guaranteeing that there will not be any drift of performance due to vacuum degradation throughout the MEMS device lifetime.
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PageLid is a metallic, ceramic, glass or germanium lid bearing customer-defined patterns of SAES Page film: getter film direct patterning on the lid avoids any welding of bulk getters in discrete miniaturized hermetic packages, thus cutting-down assembly time and final costs.
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Thanks to the Group’s proven capability of teaming up with customers to define product requirements and realize totally customized solutions, SAES Getters can implement tailor-made getter film composition and deposition patterns: PageLid sizes and shapes fit any package base, while the Page film can be patterned with different shapes on a variety of commercially available lid materials, eliminating the need of any handling and welding of discrete getters.
The Page film deposited on PageLid consists of SAES' patented zirconium alloy, whose composition and morphology are optimized to maximize sorption performance and reduce activation temperature.
Through the chemical sorption of active gases, including H2O, O2, CO, CO2, N2 and H2, the Page film drastically reduces outgassing from the lid material area and its absorption capacity can be custom-defined to ensure the device designed lifetime.
Page film sorption curves for H2 and CO
(click on the chart to enlarge)
Page film has good adhesion properties, fully complying with the adhesion test method ATSM D 3359-02, the semiconductor industry tape test.
Page film is also mechanically stable with respect to temperature cycles used in automotive applications (tested up to 500 temperature cycles from - 40 up to + 150 °C).
PageLid covers a wide range of MEMS application fields, such as:
- Gyroscopes and accelerometers
- Infrared sensors
- RF devices
- Pressure sensors
- Resonators
- Optical devices
- Biomedical devices
Browse the Product Box for further details.
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