{"id":2237,"date":"2023-10-24T17:45:06","date_gmt":"2023-10-24T15:45:06","guid":{"rendered":"https:\/\/www.saesgetters.com\/highvacuum\/solution\/modules-uhv\/"},"modified":"2026-01-08T15:38:43","modified_gmt":"2026-01-08T14:38:43","slug":"modules-uhv","status":"publish","type":"solution","link":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/solution\/modules-uhv\/","title":{"rendered":"Modules UHV"},"content":{"rendered":"\n
\n
\n

UHV\u30a6\u30a7\u30cf\u30fc\u30e2\u30b8\u30e5\u30fc\u30eb\u306f\u3001\u30d5\u30e9\u30f3\u30b8\u30ec\u30b9NEG\u30dd\u30f3\u30d7\u3067\u3001\u4e3b\u8981\u306a\u6d3b\u6027\u30ac\u30b9\u306b\u5bfe\u3057\u3066\u9ad8\u3044\u5438\u7740\u80fd\u529b\u306e\u5206\u6563\u6392\u6c17\u304c\u5fc5\u8981\u3068\u3055\u308c\u308b\u8d85\u9ad8\u771f\u7a7a\uff08UHV\uff09\u7528\u9014\u5411\u3051\u306b\u7279\u5225\u306b\u958b\u767a\u3055\u308c\u307e\u3057\u305f\u3002\uff08\u5438\u7740\u53ef\u80fd\u306a\u6d3b\u6027\u30ac\u30b9\uff1b\u6c34\u7d20 (H\u2082) \u3001\u6c34\u84b8\u6c17 (H\u2082O)\u3001\u9178\u7d20 (O\u2082)\u3001\u7a92\u7d20 (N\u2082)\u3001\u4e00\u9178\u5316\u70ad\u7d20 (CO)\u3001\u4e8c\u9178\u5316\u70ad\u7d20 (CO\u2082) \u306a\u3069\uff09<\/p>\n

UHV\u30a6\u30a7\u30cf\u30fc\u30e2\u30b8\u30e5\u30fc\u30eb\u306f\u3001UHV\u30b0\u30ec\u30fc\u30c9\u306eZAO\u00ae NEG\u5408\u91d1\u306e\u30c7\u30a3\u30b9\u30af\u3092\u642d\u8f09\u3057\u3066\u304a\u308a\u3001\u5f93\u6765\u306e\u30d5\u30e9\u30f3\u30b8\u4ed8\u304d\u30dd\u30f3\u30d7\u3067\u306f\u30b3\u30f3\u30c0\u30af\u30bf\u30f3\u30b9\u306e\u5236\u9650\u306b\u3088\u308a\u52b9\u7387\u304c\u4f4e\u4e0b\u3059\u308b\u53ef\u80fd\u6027\u306e\u3042\u308b\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3044\u3066\u3001\u975e\u5e38\u306b\u512a\u308c\u305f\u6392\u6c17\u901f\u5ea6\u3068\u9577\u5bff\u547d\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002\u30b9\u30da\u30fc\u30b9\u306e\u5236\u7d04\u3084\u5c40\u6240\u7684\u306a\u30ac\u30b9\u8ca0\u8377\u306b\u3088\u308a\u5206\u6563\u6392\u6c17\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u304c\u5fc5\u8981\u3068\u306a\u308b\u771f\u7a7a\u30c1\u30e3\u30f3\u30d0\u30fc\u3078\u306e\u7d44\u307f\u8fbc\u307f\u306b\u6700\u9069\u3067\u3059\u3002<\/p>\n

\u8907\u6570\u306eUHV\u30a6\u30a7\u30cf\u30fc\u30e2\u30b8\u30e5\u30fc\u30eb\u306f\u3001\u76f4\u5217\u307e\u305f\u306f\u4e26\u5217\u306e\u96fb\u6c17\u63a5\u7d9a\u306b\u3088\u308a\u540c\u6642\u306b\u4f5c\u52d5\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002SAES\u306f\u3001\u8a2d\u7f6e\u306b\u9069\u3057\u305f\u96fb\u529b\u4f9b\u7d66\u65b9\u6cd5\u3068\u6d3b\u6027\u5316\u30d1\u30e9\u30e1\u30fc\u30bf\u3092\u7279\u5b9a\u3059\u308b\u305f\u3081\u306e\u6280\u8853\u7684\u30b5\u30dd\u30fc\u30c8\u3092\u63d0\u4f9b\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<\/div> <\/div>\n\n

\n
\n
\n \n \"SAES
<\/div>\n <\/div>\n <\/div>\n <\/div>\n \n
\n
\n
<\/div>\n <\/div>\n\n<\/div>\n\n\n\n
\n
\n
\n

\u7279\u5fb4<\/h4>\n <\/div>\n
    \n
  • H\u2082\u3001H\u2082O\u3001O\u2082\u3001N\u2082\u3001CO\u3001CO\u2082\u3092\u542b\u3080\u3042\u3089\u3086\u308b\u6d3b\u6027\u30ac\u30b9\u306b\u5bfe\u3057\u3066\u9ad8\u3044\u6392\u6c17\u901f\u5ea6\u3092\u5b9f\u73fe<\/li>\n
  • UHV\u304a\u3088\u3073XHV\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3044\u3066\u512a\u308c\u305f\u5438\u7740\u5bb9\u91cf\u3068\u9577\u5bff\u547d\u3092\u5b9f\u73fe<\/li>\n
  • \u8d85\u9ad8\u771f\u7a7a\uff08UHV\uff09\u304a\u3088\u3073\u6975\u9ad8\u771f\u7a7a\uff08XHV\uff09\u74b0\u5883\u306b\u304a\u3044\u3066\u3082\u6e1b\u8870\u306e\u7121\u3044\u5b89\u5b9a\u3057\u305f\u6392\u6c17\u6027\u80fd\u3092\u5b9f\u73fe<\/li>\n
  • \u5f37\u78c1\u5834\u74b0\u5883\u4e0b\u3067\u306e\u4f7f\u7528\u306b\u5bfe\u5fdc\u3057\u3001\u67d4\u8edf\u306b\u30b7\u30b9\u30c6\u30e0\u3078\u306e\u7d71\u5408\u304c\u53ef\u80fd<\/li>\n
  • \u30aa\u30a4\u30eb\u30d5\u30ea\u30fc\u3001\u632f\u52d5\u30d5\u30ea\u30fc\u306e\u52d5\u4f5c\u3067\u3001\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u306b\u654f\u611f\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u6700\u9069<\/li>\n
  • \u8efd\u91cf\u30fb\u30b3\u30f3\u30d1\u30af\u30c8\u8a2d\u8a08\u306b\u3088\u308a\u3001\u30b3\u30f3\u30c0\u30af\u30bf\u30f3\u30b9\u5236\u9650\u306e\u3042\u308b\u30b7\u30b9\u30c6\u30e0\u3067\u3082\u6700\u9069\u306a\u5834\u6240\u306b\u8a2d\u7f6e\u53ef\u80fd<\/li>\n<\/ul>\n<\/div> <\/div>\n\n \n
    \n
    \n
    <\/div>\n <\/div>\n\n<\/div>\n\n\n\n
    \n
    \n
    \n

    \u4e3b\u306a\u7528\u9014\u4f8b<\/h4>\n <\/div>\n
      \n
    • \u30a4\u30aa\u30f3\u30dd\u30f3\u30d7\u3001\u62e1\u6563\u30dd\u30f3\u30d7\u3001\u30af\u30e9\u30a4\u30aa\u30dd\u30f3\u30d7\u3001\u30bf\u30fc\u30dc\u5206\u5b50\u30dd\u30f3\u30d7\u3068\u306e\u7d44\u307f\u5408\u308f\u305b\u306b\u3088\u308b\u5230\u9054\u771f\u7a7a\u5ea6\u306e\u5411\u4e0a<\/li>\n
    • \u5b89\u5b9a\u3057\u305f\u8d85\u9ad8\u771f\u7a7a\u6027\u80fd\u3092\u5fc5\u8981\u3068\u3059\u308b\u8868\u9762\u5206\u6790\u30b7\u30b9\u30c6\u30e0<\/li>\n
    • \u7c92\u5b50\u52a0\u901f\u5668\u3001\u30b7\u30f3\u30af\u30ed\u30c8\u30ed\u30f3\u653e\u5c04\u5149\u6e90\u3001\u304a\u3088\u3073\u95a2\u9023\u30d3\u30fc\u30e0\u30e9\u30a4\u30f3\u88c5\u7f6e\u3067\u306e\u4f7f\u7528<\/li>\n
    • \u4f4e\u6d88\u8cbb\u96fb\u529b\u3068\u30b3\u30f3\u30d1\u30af\u30c8\u306a\u30b5\u30a4\u30ba\u3092\u5b9f\u73fe\u3057\u3001\u643a\u5e2f\u578b\u771f\u7a7a\u88c5\u7f6e\u306b\u6700\u9069<\/li>\n
    • UHV\u74b0\u5883\u3067\u52d5\u4f5c\u3059\u308b\u96fb\u5b50\u9855\u5fae\u93e1\uff08SEM\u304a\u3088\u3073TEM\uff09\u306b\u6700\u9069<\/li>\n<\/ul>\n<\/div> <\/div>\n\n \n
      \n
      \n <\/div>\n <\/div>\n\n<\/div>\n\n\n\n
      \n<\/div>\n
      \n
      \n

      Documents<\/h3>\n
      \n <\/div>\n <\/div>\n \n
      \n<\/div>\n","protected":false},"excerpt":{"rendered":"","protected":false},"featured_media":305,"template":"","solution_cat":[58],"acf":[],"yoast_head":"\nUHV Wafer Module | Flangeless NEG Pump for Ultra-high Vacuum | SAES High Vacuum<\/title>\n<meta name=\"description\" content=\"Discover the UHV Wafer Module: a compact flangeless NEG pump with ZAO\u00ae alloy for distributed pumping in ultra-high vacuum (UHV) and XHV systems. High sorption capacity for H\u2082 and all active gases.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/solution\/modules-uhv\/\" \/>\n<meta property=\"og:locale\" content=\"ja_JP\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"UHV Wafer Module | Flangeless NEG Pump for Ultra-high Vacuum | SAES High Vacuum\" \/>\n<meta property=\"og:description\" content=\"Discover the UHV Wafer Module: a compact flangeless NEG pump with ZAO\u00ae alloy for distributed pumping in ultra-high vacuum (UHV) and XHV systems. High sorption capacity for H\u2082 and all active gases.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/solution\/modules-uhv\/\" \/>\n<meta property=\"og:site_name\" content=\"SAES High Vacuum\" \/>\n<meta property=\"article:modified_time\" content=\"2026-01-08T14:38:43+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.saesgetters.com\/highvacuum\/wp-content\/uploads\/sites\/5\/2023\/10\/Modules-UHV-1400WM.jpg?_t=1767883123\" \/>\n\t<meta property=\"og:image:width\" content=\"2560\" \/>\n\t<meta property=\"og:image:height\" content=\"2560\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data1\" content=\"1\u5206\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/solution\/modules-uhv\/\",\"url\":\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/solution\/modules-uhv\/\",\"name\":\"UHV Wafer Module | Flangeless NEG Pump for Ultra-high Vacuum | SAES High Vacuum\",\"isPartOf\":{\"@id\":\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/#website\"},\"datePublished\":\"2023-10-24T15:45:06+00:00\",\"dateModified\":\"2026-01-08T14:38:43+00:00\",\"description\":\"Discover the UHV Wafer Module: a compact flangeless NEG pump with ZAO\u00ae alloy for distributed pumping in ultra-high vacuum (UHV) and XHV systems. High sorption capacity for H\u2082 and all active gases.\",\"breadcrumb\":{\"@id\":\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/solution\/modules-uhv\/#breadcrumb\"},\"inLanguage\":\"ja\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/solution\/modules-uhv\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/solution\/modules-uhv\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Modules UHV\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/#website\",\"url\":\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/\",\"name\":\"SAES High Vacuum\",\"description\":\"Production Areas\",\"publisher\":{\"@id\":\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"ja\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/#organization\",\"name\":\"SAES Getters S.p.A.\",\"alternateName\":\"SAES Getters\",\"url\":\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ja\",\"@id\":\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.saesgetters.com\/highvacuum\/wp-content\/uploads\/sites\/5\/2024\/01\/saes-getters-logo.svg\",\"contentUrl\":\"https:\/\/www.saesgetters.com\/highvacuum\/wp-content\/uploads\/sites\/5\/2024\/01\/saes-getters-logo.svg\",\"width\":\"1024\",\"height\":\"1024\",\"caption\":\"SAES Getters S.p.A.\"},\"image\":{\"@id\":\"https:\/\/www.saesgetters.com\/highvacuum\/ja\/#\/schema\/logo\/image\/\"},\"sameAs\":[\"https:\/\/www.linkedin.com\/company\/saes-getters\/\"]}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"UHV Wafer Module | Flangeless NEG Pump for Ultra-high Vacuum | SAES High Vacuum","description":"Discover the UHV Wafer Module: a compact flangeless NEG pump with ZAO\u00ae alloy for distributed pumping in ultra-high vacuum (UHV) and XHV systems. High sorption capacity for H\u2082 and all active gases.","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/solution\/modules-uhv\/","og_locale":"ja_JP","og_type":"article","og_title":"UHV Wafer Module | Flangeless NEG Pump for Ultra-high Vacuum | SAES High Vacuum","og_description":"Discover the UHV Wafer Module: a compact flangeless NEG pump with ZAO\u00ae alloy for distributed pumping in ultra-high vacuum (UHV) and XHV systems. High sorption capacity for H\u2082 and all active gases.","og_url":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/solution\/modules-uhv\/","og_site_name":"SAES High Vacuum","article_modified_time":"2026-01-08T14:38:43+00:00","og_image":[{"width":2560,"height":2560,"url":"https:\/\/www.saesgetters.com\/highvacuum\/wp-content\/uploads\/sites\/5\/2023\/10\/Modules-UHV-1400WM.jpg?_t=1767883123","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_misc":{"Est. reading time":"1\u5206"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/solution\/modules-uhv\/","url":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/solution\/modules-uhv\/","name":"UHV Wafer Module | Flangeless NEG Pump for Ultra-high Vacuum | SAES High Vacuum","isPartOf":{"@id":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/#website"},"datePublished":"2023-10-24T15:45:06+00:00","dateModified":"2026-01-08T14:38:43+00:00","description":"Discover the UHV Wafer Module: a compact flangeless NEG pump with ZAO\u00ae alloy for distributed pumping in ultra-high vacuum (UHV) and XHV systems. High sorption capacity for H\u2082 and all active gases.","breadcrumb":{"@id":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/solution\/modules-uhv\/#breadcrumb"},"inLanguage":"ja","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.saesgetters.com\/highvacuum\/ja\/solution\/modules-uhv\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/solution\/modules-uhv\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/"},{"@type":"ListItem","position":2,"name":"Modules UHV"}]},{"@type":"WebSite","@id":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/#website","url":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/","name":"SAES High Vacuum","description":"Production Areas","publisher":{"@id":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"ja"},{"@type":"Organization","@id":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/#organization","name":"SAES Getters S.p.A.","alternateName":"SAES Getters","url":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/","logo":{"@type":"ImageObject","inLanguage":"ja","@id":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/#\/schema\/logo\/image\/","url":"https:\/\/www.saesgetters.com\/highvacuum\/wp-content\/uploads\/sites\/5\/2024\/01\/saes-getters-logo.svg","contentUrl":"https:\/\/www.saesgetters.com\/highvacuum\/wp-content\/uploads\/sites\/5\/2024\/01\/saes-getters-logo.svg","width":"1024","height":"1024","caption":"SAES Getters S.p.A."},"image":{"@id":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/#\/schema\/logo\/image\/"},"sameAs":["https:\/\/www.linkedin.com\/company\/saes-getters\/"]}]}},"_links":{"self":[{"href":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/wp-json\/wp\/v2\/solution\/2237"}],"collection":[{"href":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/wp-json\/wp\/v2\/solution"}],"about":[{"href":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/wp-json\/wp\/v2\/types\/solution"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/wp-json\/wp\/v2\/media\/305"}],"wp:attachment":[{"href":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/wp-json\/wp\/v2\/media?parent=2237"}],"wp:term":[{"taxonomy":"solution_cat","embeddable":true,"href":"https:\/\/www.saesgetters.com\/highvacuum\/ja\/wp-json\/wp\/v2\/solution_cat?post=2237"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}