{"id":347,"date":"2023-10-24T18:52:51","date_gmt":"2023-10-24T16:52:51","guid":{"rendered":"https:\/\/www.saesgetters.com\/highvacuum\/?post_type=solutions&p=347"},"modified":"2025-08-08T12:22:16","modified_gmt":"2025-08-08T10:22:16","slug":"nextorr-hv","status":"publish","type":"solution","link":"https:\/\/www.saesgetters.com\/highvacuum\/solution\/nextorr-hv\/","title":{"rendered":"NEXTorr HV"},"content":{"rendered":"\n
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The NEXTorr<\/strong>\u00ae HV pumps<\/strong> are compact high vacuum pumping solutions<\/strong> that integrate a sputter ion pump (SIP)<\/strong> and a non-evaporable getter (NEG) pump<\/strong> into a single, high-efficiency system. This hybrid configuration ensures exceptional pumping speed<\/strong>, high sorption capacity<\/strong>, and low weight<\/strong>, making it ideal for applications where space constraints<\/strong> and performance<\/strong> are critical.<\/p>\n

Each pump incorporates ZAO\u00ae (Zr-V-Ti-Al) NEG alloy<\/strong>, specifically engineered for high vacuum environments<\/strong>, to provide superior gas capture capability across all active gases<\/strong>, including H\u2082, O\u2082, CO, CO\u2082, and N\u2082.<\/p>\n<\/div> <\/div>\n\n

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Pumping Speed and Capacity for the Main Gas Species<\/h4>\n <\/div>\n
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Product Description<\/b><\/td>\nPumping Speed (l\/s)<\/b><\/td>\nSorpion Capacity (Torr l)<\/b><\/td>\n<\/tr>\n
H2<\/b><\/td>\nH2O<\/b><\/td>\nO2<\/b><\/td>\nCO2<\/b><\/td>\nN2<\/b><\/td>\nH2<\/b><\/td>\nH2O<\/b><\/td>\nO2<\/b><\/td>\nCO2<\/b><\/td>\nN2<\/b><\/td>\n<\/tr>\n
NEXTorr HV 100<\/td>\n80<\/td>\n70<\/td>\n55<\/td>\n40<\/td>\n25<\/td>\n910<\/td>\n86<\/td>\n43<\/td>\n10<\/td>\n43<\/td>\n<\/tr>\n
NEXTorr HV 200<\/td>\n155<\/td>\n130<\/td>\n110<\/td>\n90<\/td>\n50<\/td>\n1680<\/td>\n150<\/td>\n75<\/td>\n18<\/td>\n75<\/td>\n<\/tr>\n
NEXTorr HV 300<\/td>\n300<\/td>\n280<\/td>\n260<\/td>\n190<\/td>\n130<\/td>\n4000<\/td>\n380<\/td>\n190<\/td>\n45<\/td>\n190<\/td>\n<\/tr>\n
NEXTorr HV 1200<\/td>\n1150<\/td>\n1000<\/td>\n900<\/td>\n520<\/td>\n340<\/td>\n13600<\/td>\n1320<\/td>\n660<\/td>\n160<\/td>\n660<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>

Notes:<\/strong><\/p>\n

Pumping speed values refer to initial measurements<\/strong> with the NEG element fully exposed<\/strong> within the vacuum chamber (\u201cnude\u201d configuration), ensuring maximum gas sorption performance.<\/p>\n

H\u2082O values are estimated<\/strong>, as precise calibration under all environmental conditions is complex.<\/p>\n

Sorption capacity values<\/strong> (except for H\u2082) are based on performance at ~200\u202f\u00b0C, supporting 20+ regeneration cycles<\/strong> under standard high vacuum<\/strong> operation. Under lower gas load<\/strong> conditions or room temperature (RT)<\/strong> usage, the pump can be reactivated 100 times or more<\/strong>.<\/p>\n

CO pumping capacity<\/strong> is considered comparable to CO\u2082<\/strong>, given their similar interaction with getter materials.<\/p>\n<\/div> <\/div>\n\n \n

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General Features<\/h4>\n <\/div>\n
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  • Ultra-compact design<\/strong> with low weight for easy integration into high vacuum systems<\/strong>.<\/li>\n
  • Consistent high pumping speed<\/strong> for all active gases, including hydrogen, oxygen, and nitrogen<\/strong>.<\/li>\n
  • Efficient noble gas and methane pumping<\/strong>, supporting challenging gas mixtures in harsh environments.<\/li>\n
  • Large sorption capacity<\/strong> even in non-baked or elastomer-sealed systems<\/strong>.<\/li>\n
  • Rapid pump-down performance<\/strong> after air venting\u2014no baking required.<\/li>\n
  • Ideal for Viton-sealed vacuum chambers<\/strong> and setups with significant outgassing.<\/li>\n
  • Low power consumption<\/strong> during continuous operation at ~200\u202f\u00b0C.<\/li>\n
  • Engineered for minimal magnetic field interference<\/strong>, supporting use near sensitive instruments.<\/li>\n
  • Integrated pressure indication capability<\/strong>, simplifying system diagnostics.<\/li>\n<\/ul>\n<\/div> <\/div>\n\n \n
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    Applications<\/h4>\n <\/div>\n
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    • Enhancing the ultimate pressure in high vacuum (HV) and ultra-high vacuum (UHV) environments<\/strong>.<\/li>\n
    • Essential in particle accelerators, synchrotron radiation sources<\/strong>, and beamlines.<\/li>\n
    • Applied in SEM and TEM electron microscopes<\/strong>, improving imaging quality by reducing residual gas.<\/li>\n
    • Deployed in portable vacuum systems and field-deployable instrumentation<\/strong>.<\/li>\n
    • Used in surface science<\/strong> and material characterization systems<\/strong> requiring stable HV\/UHV.<\/li>\n
    • Trusted as process pumps<\/strong> for vacuum chambers in semiconductor and thin film deposition<\/strong>.<\/li>\n
    • Ideal for controlled hydrogen isotope pumping, storage, and release<\/strong> in fusion and energy research.<\/li>\n<\/ul>\n<\/div> <\/div>\n\n \n
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      Documents<\/h3>\n
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      Published on Dec 14, 2023<\/div><\/div>

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      Published on Dec 14, 2023<\/div><\/div>

      NEXTorr\u00ae HV 200<\/h3> <\/div>\n
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      Published on Dec 14, 2023<\/div><\/div>

      NEXTorr\u00ae HV 300<\/h3> <\/div>\n
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      Published on Dec 14, 2023<\/div><\/div>

      NEXTorr\u00ae HV pumps<\/h3> <\/div>\n
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      Published on Feb 20, 2024<\/div><\/div>

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      Published on May 06, 2025<\/div><\/div>

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      \n<\/div>\n","protected":false},"excerpt":{"rendered":"","protected":false},"featured_media":348,"template":"","solution_cat":[37],"acf":[],"yoast_head":"\nNEXTorr\u00ae HV NEG Pumps | Compact High Vacuum Pumping Solutions | SAES High Vacuum<\/title>\n<meta name=\"description\" content=\"NEXTorr\u00ae HV hybrid pumps combine sputter ion pump (SIP) and NEG technologies for high vacuum systems. 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