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NEG pumps have several unique characteristics which make them particularly attractive for UHV-XHV  applications.
 

Main features are:

• The highest pumping efficiency for hydrogen, the main residual gas in UHV-XHV systems
• Pumping speed for active gases does not decline at low pressure. Pressure as low as 10-14 mbar has been obtained using NEG technology.
• Very compact package, much more compact and lighter than any other type of pumps.
• The highest pumping speed per unit pump volume, vacuum system miniaturization is possible
• Once activated they do not require power to operate
• Vibration-free, ideally suited for electron microscopes, semiconductor inspection tools or vibration-sensitive equipment and systems.
• Negligible interaction with magnetic fields.
• Pumping of selected heavy hydrocarbons and organics possible.