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Getter films for MEMS

Getter films for MEMS getter material are products specifically designed for vacuum packaging of MEMS. For both wafer level  (PageWafer®) and discrete (PageLid®, PageSheet®) MEMS packaging SAES offer a variety of different solutions that enable hi-vacuum performance, long term stability and device reliability. The getter for MEMS are common and technically accepted way to maintain and control vacuum in hermetically sealed MEMS used in a large number of applications such as defense & security, automotive, industrial and consumer. 

Highlights

  • High vacuum
  • Long term stability
  • High sorption capacity for all active gasses
  • Activation temperature compatible with all main packaging procedures
  • Different pattering methods (Hard masking, Lift-off)
  • Particle free

 

Final Applications

  • Uncooled IR sensors
  • MEMS gyro
  • Resonators
  • Time frequency devices
  • High end pressure sensors
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