General selection criteria should consider
- pump installation options (flanged and flangeless), getter material (porous sintered or compressed NEG, thin film),
- gas to be pumped
- pump operative pressure.
Refer to the table below for general guidelines. SAES can provide its expertise through its highly skilled technical personnel to identify together the proper solution.
Table 1
|
Pump installation |
Pump models/lines |
Selection criterions |
|
Flanged |
CapaciTorr, NEXTorr, SorbAC getter cartridge pumps |
Easy “plug-in” installation |
|
Flangeless |
ZAO Wafer modules, Sorb AC modules |
In situ pumping and maximization of effective pumping speed |
Table 2
|
Getter type |
Pump models/lines |
Selection criterions |
|
Porous Sintered NEG |
CapaciTorr, NEXTorr , ZAO Wafer modules |
Dust sensitive applications High pumping performance |
|
Compressed NEG |
SorbAC |
Low end applications |
|
Thin film NEG |
Sputtered NEG coating |
Low conductance vacuum chambers |
Table 3 *(H2, H2O, CO, CO2, O2, N2) ** (CH4, NOBLE GASES)
|
Gas to be pumped Pressure Level |
Getterable*gases
|
Getterable*+inert**gases
|
|
UHV (FROM 1E-7Pa to 1E-12Pa) |
CapaciTorr® CapaciTorr® Z UHV wafer modules |
NEXTorr ® NEXTorr Z |
|
HV (1Pa transient-1E-6 Pa stationary) |
CapaciTorr ® HV HV wafer modules |
NEXTorr ® HV |
