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Getter Films Page technology

Getter Films Page technology

Page consists of a few-microns thick getter film that can be deposited on different substrates and in a variety of patterns, to deliver long-term vacuum stability and device reliability.


  • MEMS and MOEMS
  • Gyroscopes and accelerometers
  • Infrared sensors
  • RF devices
  • Pressure sensors
  • Resonators
  • Optical devices
  • Biomedical devices
  • Time management crystal devices
  • Atomic clock cells