Page consists of a few-microns thick getter film that can be deposited on different substrates and in a variety of patterns, to deliver long-term vacuum stability and device reliability.
EXAMPLES OF APPLICATIONS:
- MEMS and MOEMS
- Gyroscopes and accelerometers
- Infrared sensors
- RF devices
- Pressure sensors
- Resonators
- Optical devices
- Biomedical devices
- Time management crystal devices
- Atomic clock cells
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