ZAO Wafer Modules

ZAO based Wafer Modules are flangeless high performance NEG pump solutions suited for several vacuum applications requiring the distribution of large pumping speeds and capacity for H2 and all the active gases (i.e., H2O, O2, N2, CO, CO2).

Highlights

• In situ pumping;
• Modularity: series or parallel connections of several modules;
• Slim geometry;
• Flangeless installation

Applications

• Process and transfer chambers of Thin film deposition equimpent (OLED, semiconductors)
• Synchrotron or FEL beamlines, mirror chambers or monochromators