Getter Films (Page® technology)
Page consists of a few-microns thick getter film that can be deposited on different substrates and in a variety of patterns, to deliver long-term vacuum stability and device reliability.
PageLid
The direct integration of Page film into discrete hermetic ceramic or metallic packages for vacuum or inert gas sealed devices.
Discover morePageWafer
A “cap” wafer for wafer-level MEMS packages, with integrated Page film. PageWafer can be customized to meet very specific design requirements.
Discover morePageSheet
A pre-etched metal substrate (Kovar, AISI, other metals) covered by Page film, to be integrated in into discrete hermetic or inert gas sealed packages.
Discover moreApplications
- MEMS and MOEMS
- Gyroscopes and accelerometers
- Infrared sensors
- RF devices
- Pressure sensors
- Resonators
- Optical devices
- Biomedical devices
- Time management crystal devices
- Atomic clock cells
Documents
PageLid
Last update: Feb 16, 2024 11:22am
PageLid and PageWafer
Last update: Feb 13, 2024 05:32pm
PageSheet
Last update: Feb 16, 2024 11:23am
PageWafer
Last update: Feb 16, 2024 11:24am