CapaciTorr D/Z (UHV)

CapaciTorr® are flanged pumps using porous sintered NEG disks.

In UHV/XHV pressure level (10-9 Torr and lower), two main CapaciTorr series can be supplied:

• CapaciTorr “D” series, based on St 172 NEG material, operating in the field of UHV/XHV applications since early ’90s

• CapaciTorr “Z” series, based on the new ZAO® UHV NEG alloy, which further improves the pumping performance for H2, enhances the mechanical robustness of the disks, and reduces the outgassing during the thermal activation process (typically lasting 1 hour)

Furthermore, the ZAO NEG alloy features far better pumping speed than the St 172 when activated at lower temperature.

Notes:

The values for H2O are estimated.

Pumping speed data refer to the initial values in nude configuration. Capacity based on speed at 5% of the initial value in nude configuration.

>100 reactivations (sorption cycles) are possible.

• Extremely compact and low weight
• High pumping speed for all active gases
• High sorption capacity and lifetime
• Constant pumping speed in UHV and XHV
• Operation at room temperature without power after activation
• Oil free and vibration free
• Operation in presence of high magnetic fields
• Reversible pumping of hydrogen and its isotopes

• Improving ultimate vacuum in combination with ion, diffusion, cryogenic or turbomolecular pumps
• Particle accelerators, synchrotron radiation sources
• Scanning/Transmission electron microscopes
• Portable vacuum instrumentation
• Surface analysis systems
• Process pumps for vacuum devices and deposition chambers
• Pumping, storing and releasing hydrogen isotopes