NEXTorr D/Z (UHV)

The NEXTorr® UHV pumps are compact Ultra High Vacuum pumps that efficiently combine a sputter ion pump (SIP) and a Non Evaporable Getter (NEG) pump into a vacuum solution featuring high pumping speeds and capacities yet retaining a low weight and a minimal footprint.

Two versions are currently available:

• NEXTorr “D” series, based on St 172 (Zr-V-Fe) NEG alloy, operating in the UHV/XHV field since the ‘90s

• NEXTorr “Z” series, based on the novel ZAO® (Zr-V-Ti-Al) NEG alloy, developed for further improving the pumping speed and capacity for H2, keeping the same compact footprint

All NEXTorr D and Z series share the same sputter ion pump: CF35 and CF63 flanged models are equipped with a 6 l/s (Ar) and 15 l/s (CH4) either diode either noble diode pump; CF100 flanged models are equipped with a 10 l/s (Ar), 32 l/s (CH4) noble diode pump.

For applications requiring higher performances for inert gases, NEXTorr D500- StarCell and NEXTorr D1000–StarCell pumps are ideal solutions. They combine two high speed NEG cartridges (500 and 1000 l/s for H2, respectively), with a StarCell ion pump featuring 21 l/s (Ar) and 30 l/s (CH4), respectively.

• Extremely compact and low weight
• High and constant pumping speed for all active gases in UHV-XHV
• Pumping speed for noble gases and methane
• Long lasting in UHV-XHV
• Negligible power consumption in operation
• Reduced magnetic interference
• Able to indicate system pressure
• Maintenance-free

• Improvement of the ultimate vacuum in UHV-XHV systems
• Particle accelerators, synchrotron radiation sources
• Atom/Ion Trap systems, atomic clocks/fountains, interferometers
• Scanning/Transmission electron microscopes
• Portable vacuum instrumentation and suitcases
• Surface analysis systems
• General purpose UHV systems