NEXTorr D/Z (UHV)

NEXTorr® UHV pumps are advanced Ultra-high Vacuum (UHV) pumping solutions that integrate a sputter ion pump (SIP) and a Non-Evaporable Getter (NEG) pump into one compact, high-performance device. Designed to deliver exceptional pumping speed and capacity for active gases—especially hydrogen—these hybrid pumps maintain a minimal footprint and low weight, ideal for space-constrained UHV systems.

Two NEG-based series are available to meet different performance needs:

• NEXTorr® “D” Series, built around the St 172 (Zr-V-Fe) NEG alloy, proven in UHV/XHV environments since the 1990s

• NEXTorr® “Z” Series, engineered with the novel ZAO® (Zr-V-Ti-Al) NEG alloy, offering enhanced hydrogen pumping speed and capacity, along with improved disk robustness and lower outgassing during activation

All models in the D and Z series feature high-efficiency sputter ion pumps, optimized to work in synergy with the NEG element:

• CF35 / CF63 flanged models: 6 l/s (Ar) and 15 l/s (CH₄), available in diode or noble diode versions
• CF100 flanged models: 10 l/s (Ar) and 32 l/s (CH₄), with noble diode configuration

For systems requiring enhanced performance on noble gases and methane, the NEXTorr® D500-StarCell and D1000-StarCell models integrate two high-capacity NEG cartridges (500 and 1000 l/s for H₂) and a StarCell ion pump offering 21 l/s (Ar) and 30 l/s (CH₄), respectively.

• Extremely compact and low weight, ideal for systems with limited space
• High and constant pumping speed for all active gases, including H₂, CO, CO₂, N₂, O₂
• Pumping speed for noble gases and methane through integrated ion pump
• Long-lasting performance in UHV and XHV environments
• Negligible power consumption during standard operation
• Reduced magnetic interference, suitable for sensitive instruments
• Capability to indicate system pressure
• Maintenance-free design with no moving parts or oil contamination

• Improvement of the ultimate vacuum in UHV and XHV systems
• Particle accelerators and synchrotron radiation sources
• Atom/ion trap systems, atomic clocks, and interferometers
• Scanning and transmission electron microscopes (SEM/TEM)
• Portable ultra-high vacuum instrumentation and suitcases
• Surface analysis systems
• General-purpose UHV setups in both industrial and research environments