Modules UHV

The UHV Wafer Module is a flangeless Non-Evaporable Getter (NEG) pump specifically designed for ultra-high vacuum (UHV) applications that require distributed pumping with high sorption capacity for hydrogen (H₂) and all major active gases, including water vapor (H₂O), oxygen (O₂), nitrogen (N₂), carbon monoxide (CO), and carbon dioxide (CO₂).

Built with disks made of the UHV-grade ZAO® NEG alloy, the UHV Wafer Module ensures exceptional pumping speed and lifetime performance even in conductance-limited systems, where traditional flange-mounted pumps may be less effective. This makes it ideal for integration inside vacuum chambers where space constraints and localized gas loads require a distributed pumping solution.

Multiple UHV Wafer Modules can be operated simultaneously through series or parallel electrical connections. SAES provides technical support to identify the optimal electrical configuration and activation parameters for each specific installation.

• High pumping speed for all active gases including H₂, H₂O, O₂, N₂, CO, and CO₂
• Excellent sorption capacity and extended operational lifetime for UHV and XHV systems
• Constant and stable pumping performance in ultra-high vacuum (UHV) and extreme high vacuum (XHV) environments
• Fully compatible with strong magnetic fields, ensuring flexibility in system integration
• Oil-free and vibration-free operation, ideal for contamination-sensitive applications
• Lightweight and compact design for ease of installation in conductance-limited systems

• Enhancement of the ultimate vacuum in combination with ion pumps, diffusion pumps, cryogenic pumps, or turbomolecular pumps
• Integration in surface analysis systems requiring stable ultra-high vacuum performance
• Use in particle accelerators, synchrotron radiation sources, and associated beamline equipment
• Ideal for portable vacuum instrumentation, offering low power consumption and compact dimensions
• Suitable for electron microscopes (both SEM and TEM) operating in UHV conditions