NEXTorr HV

The NEXTorr® HV pumps are compact High Vacuum (HV) pumps that efficiently combine a sputter ion pump (SIP) and a Non-Evaporable Getter (NEG) pump into a vacuum solution featuring high pumping speeds and large sorption capacities yet retaining a low weight and a minimal footprint. The NEXTorr HV pumps implement the ZAO® (Zr-V-Ti-Al) NEG alloy in its High Vacuum version, featuring large capacity for all the active gases.

These pumps are specifically designed and engineered to operate in the high vacuum regime (i.e., 10-7–10-9 Torr) and find application in all those equipment elastomer-sealed, susceptible to air permeation, and not baked out, where water sensibly contributes to the residual gas background. To exploit these benefits, the NEG element of the NEXTorr HV pumps operates permanently warm at around 200 °C with a minimal power consumption.

All NEXTorr HV pumps are equipped with a noble diode ion pump optimized to work in best synergy with the NEG element. The noble diode ion pump can efficiently work in atmosphere of non-negligible Argon throughputs typical of elastomer sealed HV systems.

Notes:

The values for H2O are estimated.

Pumping speed data refer to the initial values, and with the NEG element completely immersed in the vacuum chamber (“nude” configuration).

The capacity values (except for H2) are intended as the recommended absorbed quantity per run at around 200°C, allowing to perform more than 20 sorption cycles. In case of operation under lower gas loads or at RT, the pump can be reactivated 100 times or more.

The values for CO can be assumed very similar to those reported for CO2.

• Extremely compact and low weight
• High and constant pumping speed for all active gases
• Pumping speed for noble gases and methane
• High sorption capacity in high vacuum
• Fast pump-down after air venting and without baking
• Suitable for viton-sealed and harsh systems
• Minimal power requirement during operation
• Reduced magnetic interference
• Able to indicate system pressure

• Improvement of the ultimate vacuum in HV and UHV systems
• Particle accelerators, synchrotron radiation sources
• Scanning/Transmission electron microscopes
• Portable vacuum instrumentation and suitcases
• Surface analysis systems
• Process pumps for vacuum devices and deposition chambers
• Thin films deposition systems
• Pumping, storing and releasing hydrogen isotopes